Aluminum Oxide Porous Ceramic Vacuum Chuck Table Wafer for Cleaning Chucks

• Application: Industrial Ceramic
• Material: Alumina Ceramic
• Type: Ceramic Plates
• Maximum Use Temperature: 1900ºC
• Flexural Strength: 50-100MPa
• Comperssive Strength: 20-100MPa
• Porosity: 33-50%
• Color: White
• Thermal Conductivity: 3.1W/M.K
• Filtration Fineness: 0.1-100um
• Processing Service: Moulding
• Trademark: INNOVACERA
• Origin: Fujian, China

Product Description

Porous Ceramic CNC Vacuum Chuck Table: The ceramic chuck table is applied to the fields of silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package component substrate, optical component thinning, cutting and so on.

Main Appication field: · New, and refurbished, porous ceramic chucks for Disco,ADT, K&S ,Applied materials TSK,OKAMOTO,Micro Automation,Load Point etc dicing saws and grinders · 4",5",6",8,"12" regular size available in round , square ,oval shape or irregular shapes and sizes INNOVACERA porous ceramic vacuum chucks are available for for thin film substrates and flat fragile materials with different shapes and sizes. The superb flat surface of porous ceramic distributes the vacuum force equally to mitigate potential deflection. We have developed: Dicing Chucks Transparent Chucks Cleaning Chucks Printing Chucks Thinning Chucks

 

 

Alumina Porous Ceramic Material Properties
Properties	Units	Value
alumina(Al2O3)	wt%	≥ 80
silicon dioxide(SiO2)	wt%	16-18
density	g /cm3	2.3-2.5
hardness (HRA)	HRA ≥	50.00
flexure strength	MPa ≥	40.00
compressive strength	≥	600.00
porosity	%	40.00
Pore size	μm	30.00
working pressure	MPa ≤	10.00
acid resistance	mg/cm2 ≤	10.00
alkali resistance	mg/cm2 ≤	20.00

ABOUT INNOVACERA

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INNOVACERA is a professional high-tech enterprise, cooperate with Chinese University in advanced materials, many products are awarded as high-tech products and obtain patents.

Xiamen INNOVACERA engages in R&D, manufacturing and selling the products of advanced ceramic materials, including Alumina, Zirconia, Boron Nitride, Silicon Nitride, Machinable Glass Ceramic and other advanced materials. Through different manufacturing processes, we supply metallized ceramic components, alumina heater, ceramic pump components and other ceramic components as request.

EXHIBITION

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>>> Our Products are Alumina Ceramic, Zirconia Ceramic, Boron Nitride Ceramic,Porous Ceramic, Silicon Nitride Ceramic, Machinable Glass Ceramic, Beryllia Ceramic, Aluminum Nitride, Metallized Ceramic Components, Alumina Ceramic Heater, Ceramic Metering Pump And so on.

>>> Our aim is to offer ideal advanced material solution for any application.
>>> We delivery the order on time, competitive price, high quality and long service to our customers.

 

FAQ

 

Q1. Do you offer samples?
A: Yes, we'll offer you samples if we have stock, but some will charge sample fee. Shipping cost will pay by customer.

Q2. What is your terms of payment?
A: T/T in advance, Western Union, Alipay, Paypal.

Q3. How about your delivery time?
A: Depends on the requirement of the producst, according to the materials, dimensions and the manufacture process.

Q4. Do you test all your goods before delivery?
A: Yes, we have 100% test before delivery

Q5: What else products do you offer?
A: We provide the products of advanced ceramic materials, including Alumina, Zirconia, Boron Nitride, Silicon Nitride, Machinable Glass Ceramic and other advanced materials.

 

 

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