4" 5" 6" 8" 12" Alumina Porous Ceramic Vacuum Chuck Table for Semiconductor Compound Wafer

• Application: Structure Ceramic, Industrial Ceramic
• Type: Ceramic Plates
• Pore Size: 1um-100um
• Other Name: Ceramic Filter
• Advantage: Fast Delivery Date
• Porous Size: 1-100um
• Color: White/Black
• Withstand High Temperature: Over 1000ºC
• Porosity: 40%-50%
• Package: Wooden Box
• Processing Service: Moulding
• Material: Alumina or Silicon Carbide
• Transport Package: Carton Packaging
• Trademark: INNOVACERA
• Origin: Fujian, China

Product Description

 

Product Description

Porous ceramic chuck table is a so important part in semiconductor equipment such as silicon wafer processing. Porous Ceramic Chuck Tables are widely used as important components of equipment in silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package component substrate, optical component thinning cutting and so on.

The advantages include the following:

1. Strong permeability: Uniform air permeability and water permeability to ensure the uniform stress and firm adsorption of the silicon wafer, so that it does not slip during the grinding process.
2. Compact and uniform structure: Due to the dense and uniform microporous ceramic, the chuck table is not easy to adsorb silicon powder abrasives and is easy to clean.
3. High strength: No deformation during grinding, to ensure that the silicon wafer is uniformly stressed at all points during grinding, and is not easy to edge breakage and debris.
4. Long service life: The surface shape is good, the dressing cycle is long and the dressing amount is small, so it has a long service life.
5. Easy to repair: There are not cracks, chips, threshing during machining.

 

Vacuum Chuck Tbale Application:

Vacuum chucks are used in the thinning, dicing, cleaning, handling and other processes of semiconductor electronic chips, like wafers.

 

Detailed Photos

Why choose microporous ceramic vacuum chucks?

1. During the polishing and cleaning process of wafers, polishing liquid and water mist enter the working table, causing corrosion. And the microporous ceramic vacuum chucks resist corrosion.

2. The microporous ceramic vacuum chuck has no environmental pollution such as light, heat and electromagnetic, unlike the rubber or other materials vacuum chuck. And the rubber or other materials vacuum chuck will be in direct contact with the surface of the item, so it is very easy to wear. Therefore, the porous ceramic has high temperature resistance and chemical corrosion resistance, light structure and electrical insulation. So it is the best choice for vacuum chuck. 3. With its special porous structure, the microporous ceramic has very small holes and they can be machined to very precise flatness. Combined with the special air channel design, when a certain negative pressure is given, the wafer can be smoothly and stably adsorbed on the vacuum chuck, so as to avoid wafers will cause scratches and dents on the surface. Through the coordination of the focus point and suction force of the vacuum suction cup, wafer of different sizes can be adsorbed on the same ceramic surface.

4. The microporous ceramic vacuum chuck can be reused after regrinding, thereby improving the utilization rate of materials.
 

 

Properties

 

Alumina Porous Ceramic Material Properties
Properties	Units	Value
alumina(Al2O3)	wt%	≥ 80
silicon dioxide(SiO2)	wt%	16-18
density	g /cm3	2.3-2.5
hardness (HRA)	HRA ≥	50.00
flexure strength	MPa ≥	40.00
compressive strength	≥	600.00
porosity	%	40.00
Pore size	μm	30.00
working pressure	MPa ≤	10.00
acid resistance	mg/cm2 ≤	10.00
alkali resistance	mg/cm2 ≤	20.00

ABOUT INNOVACERA
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INNOVACERA is a professional high-tech enterprise, cooperate with Chinese University in advanced materials, many products are awarded as high-tech products and obtain patents.

Xiamen INNOVACERA engages in R&D, manufacturing and selling the products of advanced ceramic materials, including Alumina, Zirconia, Boron Nitride, Silicon Nitride, Machinable Glass Ceramic and other advanced materials. Through different manufacturing processes, we supply metallized ceramic components, alumina heater, ceramic pump components and other ceramic components as request.

EXHIBITION

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>>> Our Products are Alumina Ceramic, Zirconia Ceramic, Boron Nitride Ceramic,Porous Ceramic, Silicon Nitride Ceramic, Machinable Glass Ceramic, Beryllia Ceramic, Aluminum Nitride, Metallized Ceramic Components, Alumina Ceramic Heater, Ceramic Metering Pump And so on.

>>> Our aim is to offer ideal advanced material solution for any application.
>>> We delivery the order on time, competitive price, high quality and long service to our customers.

 

FAQ

Q1. Do you offer samples?
A: Yes, we'll offer you samples if we have stock, but some will charge sample fee. Shipping cost will pay by customer.

Q2. What is your terms of payment?
A: T/T in advance, Western Union, Alipay, Paypal.

Q3. How about your delivery time?
A: Depends on the requirement of the producst, according to the materials, dimensions and the manufacture process.

Q4. Do you test all your goods before delivery?
A: Yes, we have 100% test before delivery

Q5: What else products do you offer?
A: We provide the products of advanced ceramic materials, including Alumina, Zirconia, Boron Nitride, Silicon Nitride, Machinable Glass Ceramic and other advanced materials.

 

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