Alumina Porous Ceramic Vacuum Plate Used to Measure The Thickness of Semiconductor Wafers

• Application: Industrial Ceramic
• Material: Alumina Ceramic
• Type: Ceramic Plates
• Acid Resistance: Mg/Cm2 ≤10
• Porosity: 40%
• Processing Service: Welding, Cutting, Punching, Decoiling, Moulding
• Model NO.: Vacuum Chuck Plate
• Density: 2.3-2.5 G /Cm3
• Compressive Strength: ≥600
• Pore Size: 30μm
• Working Pressure: MPa ≤10
• Hardness (Hra): Hra ≥50
• Alkali Resistance: Mg/Cm2 ≤20
• Flexure Strength: MPa ≥40
• Transport Package: Standard Cartons with Foam
• Trademark: INNOVACERA
• Origin: Fujian, China
• Production Capacity: 20000 Piece/Pieces Per Month

Product Description

 

Porous Vacuum Chuck Table:

Porous ceramic chuck table is a so important part in semiconductor equipment such as silicon wafer processing.
Porous Ceramic Vacuum Chucks are widely used as important components of equipment in silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package component substrate, optical component thinning, cutting and so on.

 

The following are detailed application cases:
1. Semiconductor and Microelectronics
2. Display panel and mobile electronics
3. Photovoltaic and new energy
4. Flexible circuit
5. Precision Manufacturing

 

We have developed: Dicing Chucks Transparent Chucks Cleaning Chucks Printing Chucks Thinning Chucks
 

The advantages include the following:
 

* Strong permeability: Uniform air permeability and water permeability to ensure the uniform stress and firm adsorption of the silicon wafer, so that it does not slip during the grinding process.
* Compact and uniform structure: Due to the dense and uniform microporous ceramic, the chuck table is not easy to adsorb silicon powder abrasives and is easy to clean.
* High strength: No deformation during grinding, to ensure that the silicon wafer is uniformly stressed at all points during
grinding, and is not easy to edge breakage and debris.
* Long service life: The surface shape is good, the dressing cycle is long and the dressing amount is small, so it has a long
service life.
* Easy to repair: There are no cracks, chips, threshing during machining.

 

 

Alumina Porous Ceramic Material Properties
Properties	Units	Value
alumina(Al2O3)	wt%	≥ 80
silicon dioxide(SiO2)	wt%	16-18
density	g /cm3	2.3-2.5
hardness (HRA)	HRA ≥	50.00
flexure strength	MPa ≥	40.00
compressive strength	≥	600.00
porosity	%	40.00
Pore size	μm	30.00
working pressure	MPa ≤	10.00
acid resistance	mg/cm2 ≤	10.00
alkali resistance	mg/cm2 ≤	20.00

 

ABOUT INNOVACERA

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INNOVACERA is a professional high-tech enterprise, cooperate with Chinese University in advanced materials, many products are awarded as high tech products and obtain patents.

Xiamen INNOVACERA engages in R&D, manufacturing and selling the products of advanced ceramic materials, including Alumina, Zirconia, Boron Nitride, Silicon Nitride, Machinable Glass Ceramic and other advanced materials. Through different manufacturing processes, we supply metallized ceramic components, alumina heater, ceramic pump components and other ceramic components as request.

 

 

 

EXHIBITION

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>>> Our Products are Alumina Ceramic, Zirconia Ceramic, Boron Nitride Ceramic,Porous Ceramic, Silicon Nitride Ceramic, Machinable Glass Ceramic, Beryllia Ceramic, Aluminum Nitride, Metallized Ceramic Components, Alumina Ceramic Heater, Ceramic Metering Pump And so on.
>>> Our aim is to offer ideal advanced material solution for any application.
>>> We delivery the order on time, competitive price, high quality and long service to our customers.

 

 

 

FAQ

Q1. Do you offer samples?
A: Yes, we'll offer you samples if we have stock, but some will charge sample fee. Shipping cost will pay by customer.

Q2. What is your terms of payment?
A: T/T in advance, Western Union, Alipay, Paypal.

Q3. How about your delivery time?
A: Depends on the requirement of the producst, according to the materials, dimensions and the manufacture process.

Q4. Do you test all your goods before delivery?
A: Yes, we have 100% test before delivery

Q5: What else products do you offer?
A: We provide the products of advanced ceramic materials, including Alumina, Zirconia, Boron Nitride, Silicon Nitride, Machinable Glass Ceramic and other advanced materials.

 

 

 

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