Alumina Porous Ceramic Vacuum Plate Used to Measure The Thickness of Semiconductor Wafers

• Application: Dicing Chucks Cleaning Chucks Printing Chucks
• Power: Mechanical Transmission
• Structure: Solid
• Model NO.: Vacuum Chuck Plate
• Material: Alumina / Silicon Cabide Porous Ceramic
• Type: Ceramic Plates
• Acid Resistance: Mg/Cm2 ≤10
• Porosity: 40%
• Processing Service: Punching, Decoiling, Moulding
• Density: 2.3-2.5 G /Cm3
• Compressive Strength: ≥600
• Pore Size: 30μm
• Working Pressure: MPa ≤10
• Hardness (Hra): Hra ≥50
• Alkali Resistance: Mg/Cm2 ≤20
• Flexure Strength: MPa ≥40
• Transport Package: Customized
• Specification: Customized
• Trademark: INNOVACERA
• Origin: Fujian, China
• Production Capacity: 20000 Piece/Pieces Per Month

Product Description

 

Porous Ceramic Chuck Table Plate for Vacuum Chuck The ceramic chuck table is applied to the fields of

silicon wafer, semiconductor compound wafer, piezoelectric ceramic, glass, LED, semiconductor package

component substrate, optical component thinning, cutting and so on.
 

Main Appication field:

· New, and refurbished, porous ceramic chucks for Disco, K&S, Applied materials TSK, Micro Automation,Load

Point etc dicing saws and grinders
 

· 4",5",6",8,"12" regular size available in round, square, oval shape or irregular shapes and sizes

 

INNOVACERA porous ceramic vacuum chucks are available for for thin film substrates and flat fragile materials with
 

different shapes and sizes.The superb flat surface of porous ceramic distributes the vacuum force equally to

mitigate potential deflection.

We have developed: Dicing Chucks Transparent Chucks Cleaning Chucks Printing Chucks Thinning Chucks

 

 

 

 

 

Alumina Porous Ceramic Material Properties
Properties	Units	Value
alumina(Al2O3)	wt%	≥ 80
silicon dioxide(SiO2)	wt%	16-18
density	g /cm3	2.3-2.5
hardness (HRA)	HRA ≥	50.00
flexure strength	MPa ≥	40.00
compressive strength	≥	600.00
porosity	%	40.00
Pore size	μm	30.00
working pressure	MPa ≤	10.00
acid resistance	mg/cm2 ≤	10.00
alkali resistance	mg/cm2 ≤	20.00