D211*T5mm, 50um, Blue-Gray Alumina Porous Ceramic Disc Plates, Porous Ceramic Wafer

Product Description

Innovacera supply the Alumina Porous ceramic disc for Vacuum Chuck which is mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation, and so on.

Main Application field:
- New and refurbished alumina porous ceramic chucks for Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point, etc dicing saws and grinders.
- 6″, 8," 12″ are regular sizes, And pore size include 15um, 30um, 50um, 100um.
Materials are alumina (Color: white, light brown, dark brown, blue-gray)
- Custom size (like square, oval shape, or irregular shapes) is available for us.
 

Characteristics include:

1. High flatness and parallelism
2. Compact and uniform microstructure with high strength
3. Good permeability and uniform adsorption affinity
4. Long life time
5. Dressing easily.

Brand Name	INNOVACERA
Product name	Alumina Porous Ceramic Disc
Processing Service	Bending, Welding, Cutting, Punching, Decoiling, Moulding
Color	Blue-Gray
Shape	Round
Size	D211*T5mm
Usage	Filter
Porosity	33-50%
Pore Size	50um
Filtration Fineness	0.1-100um
Max Working Temperature	1900ºC
Compressive strength	20-100Mpa

Applications

* Filters for gases and liquids

* Capillary Electrophoresis
* Gas burners
* Chromatography
* Vacuum holding plates (vacuum chunk)
* Nano-membrane supports for sensor
applications
* Micro-bubble diffusers
* Fine or micro channels for electrophoresis Chemical or bio reactor

 

Specifically tailored techniques include:

• Spraying

• Brushing

• Backwashing

• Oven firing

• Dilute acid cleaning

• Solvent cleaning plus steam

• Ultrasonic cleaning

 

Characteristics include:
 

High flatness and parallelism Compact and uniform microstructure with high strength Good permeability and uniform adsorption

affinity Long life time dressing easily.

 

Applications

• Used in tough applications to replace porous metal or as an

alternative to plastic or fabric media

• Cleaned and reused using a variety of methods depending

on the contaminant to be removed

• Filters for gases and liquids

• Capillary Electrophoresis

• Filtration for heavy metal ions (Cr, Ni etc) in water

• High temperature chemical support for gas absorption

• High efficiency flow through catalytic supports

• Gas burners

• Chromatography

• Micro trapping systems and bio-catalytic supports

• Vacuum holding plates (vacuum chunk)

• Nano-membrane supports for sensor applications

• Micro-bubble diffusers

• Fine or micro channels for electrophoresis

• Chemical or bio reactor

 

The Detailed Regular Size as Below

                                                                             ---

 

Regular size		6, 8, 12 inches
Diameter Regular Tolerance		+/-0.10 mm
Regular Flatness		+/-0.10 mm
Regular Surface Roughness		Ra 0.8-1.6
Alumina (Al2O3)	Pore Size	Color
	15um	Light Brown
	30um	Brown
	50um	Blue-Gray
	100um	Blue-Gray

Alumina materials properties
---
 

Properties	Unit	Pore Ceramic
Al2O3 Content	wt%	≥ 80
SiO2 Content	wt%	16-18
Density	g /cm3	2.3-2.5
Hardness (HRA)	HRA ≥	50
Flexure strength	MPa ≥	40
Compressive Strength	MPa≥	600
Porosity Factor	%	40
Work Pressure	MPa ≤	10
Acid Resistance	mg/cm2 ≤	10
Alkali Resistance	mg/cm2 ≤	20