High Thermal Conductivity Aluminum Nitride Disc Plate for Etcher

Product Details
Application: Aerospace, Electronics, Medical, Refractory
Volume Resistivity: 1.4*10(14) Ω.Cm
Flexural Strength: 450MPa
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  • High Thermal Conductivity Aluminum Nitride Disc Plate for Etcher
  • High Thermal Conductivity Aluminum Nitride Disc Plate for Etcher
  • High Thermal Conductivity Aluminum Nitride Disc Plate for Etcher
  • High Thermal Conductivity Aluminum Nitride Disc Plate for Etcher
  • High Thermal Conductivity Aluminum Nitride Disc Plate for Etcher
  • High Thermal Conductivity Aluminum Nitride Disc Plate for Etcher
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Basic Info.

Color
Light Grey
Dielectric Strength
18.45 Kv/mm
Dielectric Constant
8.56 (1MHz)
Surface Roughness
0.3-0.5
Thermal Conductivity
(25°c) 180 W/Mk
Density
3.31g/cm3
Type
Ceramic Ring
Transport Package
Carton Packing
Specification
Customized
Trademark
INNOVACERA
Origin
Fujian, China

Product Description

 

Glad to share with you our new arrival product Aluminum Nitride Cover Plate Heater with the thinnest thickness of 0.75mm. It can be said that it is the first time in China that a highly difficult hot-pressed aluminum nitride disc has been produced. It is difficult to make due to below reasons:
 

High Thermal Conductivity Aluminum Nitride Disc Plate for Etcher
High Thermal Conductivity Aluminum Nitride Disc Plate for Etcher

 

1. The material is very difficult to machine due to its high hardness and brittleness, so it is very easy to have chips or scratches when handling or machining, which leads to a very high rejection rate. Anyway, it's a successful start, and we believe we could make it better and better.

2. Hot-pressed aluminum nitride ceramics are sintered by vacuum hot pressing, which is more difficult than pressureless sintering. The aluminum nitride purity is up to 99.5%(without any sintering additives), and the density after hot pressing reaches 3.3g/cm3. It also has excellent thermal conductivity and high electrical insulation. The thermal conductivity can range from 90 W/(m·k) to 210 W/(m·k).

3. The thinnest thickness is about 0.75mm, making it more difficult to machine.

 

The application of the hot-pressed aluminum nitride cover plate heater:
Cover plate heater for semiconductor


Other Application:
- Cover plates and MRI equipment(Magnetic Resonance Imaging)
- High-power detectors, plasma generators, radios
- Electrostatic chucks and heating plates for semiconductors and integrated circuits
- Infrared and microwave window material


Features:

High thermal conductivity
Expansion coefficient can match with semiconductor silicon chips
High insulation resistance and voltage withstand strength
Low dielectric constant and low dielectric loss
High mechanical strength
 

Typical Specification:

Purity: >99%
Density: >3.3 g/cm3
Compress Strength: >3,350MPa
Bending Strength: 380MPa
Thermal Conductivity: >90W/(m·K)
Coefficient of Thermal Expansion: 5.0 x 10-6/K
Max. Temp: 1,800°C
Volume Resistivity: 7×1012 Ω·cm
Dielectric Strength: 15 kV/mm


High Thermal Conductivity Aluminum Nitride Disc Plate for EtcherHigh Thermal Conductivity Aluminum Nitride Disc Plate for EtcherHigh Thermal Conductivity Aluminum Nitride Disc Plate for EtcherHigh Thermal Conductivity Aluminum Nitride Disc Plate for EtcherHigh Thermal Conductivity Aluminum Nitride Disc Plate for EtcherHigh Thermal Conductivity Aluminum Nitride Disc Plate for EtcherHigh Thermal Conductivity Aluminum Nitride Disc Plate for EtcherHigh Thermal Conductivity Aluminum Nitride Disc Plate for EtcherHigh Thermal Conductivity Aluminum Nitride Disc Plate for Etcher












 

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