High Precision Alumina Ceramic Insert Ring Chamber Semiconductor Ceramic Ring

• Application: Semiconductor Equipment
• Color: White
• Material: Alumina
• Compressive Strength: 2100-2500MPa
• Working Temperature: 1700 Degree
• Processing Service: Bending, Welding, Cutting, Punching, Decoiling
• Density: 3.8GM/Cc
• Feature: Heat Resistance
• Flexural Strength: 280-350 MPa
• Product Name: Alumina Ceramic Edge Ring
• Thermal Conductivity: 25-30 W/Mk
• Certificate: RoHS
• Purity: 95%-99%
• Type: Ceramic Rings
• Transport Package: Customized Package
• Specification: Customized
• Trademark: INNOVACERA
• Origin: Fujian, China
• Production Capacity: 10000 Piece/Pieces Per Month

Product Description

Alumina Ceramic Insert Ring Chamber is a specialized variant of plasma-resistant components, leveraging alumina's (Al2O3) unique properties to function in extreme plasma environments. 

The alumina ceramic insert ring chamber environments through high heat resistance, electrical insulation, and sputtering resistance, serving as a protective barrier and stabilizer. It shields critical components (e.g., electrodes, sensors) from ion bombardment and chemical erosion, prevents current leakage/arcing, ensures uniform plasma distribution (e.g., in semiconductor etching), and resists reactive gas contamination . Despite brittleness and limited thermal shock resistance,composite reinforcement or coatings (e.g., boron nitride) enhance its use in extreme applications like semiconductor and aerospace, balancing cost and performance.

Alumina (Al2O3) Characteristics:
* High Thermal Stability
* Superior Electrical Insulation
* Plasma Erosion Resistance
* Mechanical Hardness
* Chemical Inertness

Design & Manufacturing
* Geometry
* Fabrication
* Coatings

Ceramic Ring Applications
1. Semiconductor Manufacturing
2. Industrial Plasma Systems:
3. Fusion Research:
4. Aerospace:

DO YOU KNOW WHAT ALUMINA CERAMIC ARE?

Alumina ceramic is a kind of alumina as the main ceramic material, used in thick film integrated circuits.Alumina have good conductivity, mechanical strength and high temperature resistance.It should be noted that ultrasonic washing is needed.Alumina ceramics have a veriety of uses to meet the needs of daily use and specical properties.95 alumina porcelain is mainly used as waer-resisting parts.

Advantage:
1. Purity:92%, 95%, 96%, 99%, 99.7%

2. Good mechanical strength
3. Excellent electrical insulation
4. High-frequency loss
5. Good thermal conductivity
6. Heat, wear and corrosion resistance.

Application:

Alumina is the best-known advantaced ceramic material, is widely used in 
1.Automotive
2.Petro-chemical 
3.Fluid control
4.Material transfer
5.Industry
6.Electrical and electronic
7.Semiconductor
8.Sapphire is single-crystal alumina.

Alumina Ceramic Property
Property		Unit	92% Alumina Ceramic	95% Alumina Ceramic	99% Alumina Ceramic
Density		g/cm3	≥3.63	≥3.68	≥3.83
Water absorption		%	O	O	O
Sintering temperature		°C	1500-1700	1600-1800	1700-1800
Hardness		HV	≥1400	≥1500	≥1650
Flexural strength		Kgf/cm2	3000	3000	3000
Compressive strength		Kgf/cm2	24000	25000	26000
Fracture toughness		Map.m3/2	3~4	3~4	4~5
Maximum temperature		°C	1600	1700	1800
Coefficient of thermal expansion		/°C	8*10-6	8*10-6	8*10-6
Heat shock		T(°C)	220	220	220
Thermal conductivity		W/m.k(25-300°C)	25 14	25 14	25 14
	20°C		>1012	>1012	>1012