High-Purity Electron Beam Evaporation Coating Conductive Boron Nitride Crucible (BN Crucible)

• Application: Melting
• Color: Gray
• Material: Boron Nitride
• Shape: Conical
• Bn+Tib2 Density: 3.0g/cm3
• Binding Composition: B2o3
• Room Temperature Resistivity: 300-2000 Ω
• Operating Temperature: Below: 1800ºC
• Thermal Conductivity: > 40W/Mk
• Coefficient of Thermal Expansion: (4-6) X10-6K
• Bending Strength: > 130MPa
• Evaporation Rate: 0.35-0.5g/Min·cm2
• Transport Package: Carton Packing
• Specification: Customized
• Trademark: INNOVACERA
• Origin: Fujian, China

Product Description

Conductive boron nitride crucibles are high-purity smooth crucibles designed for electron beam evaporation coatings.In semiconductor manufacturing, boron nitride can be used as an etching agent and thin film deposition raw material, acting as a protective layer to prevent damage or contamination of the device.

In addition, boron nitride can also be used as an electron beam evaporation source material for the preparation of various thin film materials. For example: Electron beam evaporation coating conductive boron nitride crucible (BN crucible) - for thin film deposition equipment.

 

Main ingredients:
> BN+TiB2 Density 3.0g/cm3
> Binding composition: B2O3
> Color: Grey
> Room temperature resistivity: 300-2000 Ω·cm
> Operating temperature: below 1800ºC
> Thermal conductivity: > 40W/mk
> Coefficient of thermal expansion: (4-6) x10-6K
> Bending strength: > 130Mpa
> Evaporation rate: 0.35-0.5g/min·cm2

Advantages:
Good film finish, high purity, less pollution, long service life.
1.Excellent resistance to high temperatures and heat cycling. It has a low rate of thermal expansion and is resistant to wetting of most molten metals.
2.Heat-resistant up to 2000°C, boron nitride does not react with aluminum and is not volatile.
3.increase evaporation rate; Increasing the evaporation rate results in shorter cycle times and higher overall yields. 4.Rapid material change; Conductive boron nitride crucibles facilitate rapid material changes, minimize furnace chamber downtime, and improve process efficiency.
5.enhanced thermal stability; These crucibles have higher thermal stability, reducing heat transfer from the crucible itself, ensuring consistent and controllable evaporation.
 

 

Properties	Units	UHB	HB	BC	BMS	BMA	BSC	BMZ	BAN
Main Composition	-	BN>99.7%	BN>99%	BN>97.5%	BN+AL+SI	BN+ZR+AL	BN+SIC	BN+ZRO2	BN+ALN
Color	-	White	White	White	White Graphite	White Graphite	Greyish- Green	White Graphite	Greyish- Green
Density	g/cm3	1.6	2	2.0~2.1	2.2~2.3	2.25~2.35	2.4~2.5	2.8~2.9	2.8~2.9
Three-Point Bending Strength	MPa	18	35	35.00	65	65	80.00	90	90.00
Compressive Strength	MPa	45	85	70.00	145	145	175.00	220	220.00
Thermal Conductivity	W/m·k	35	40	32.00	35	35	45.00	30	85.00
Thermal Expansion Coefficient (20-1000ºC)	10-6/K	1.5	1.8	1.60	2	2	2.80	3.5	2.80
Max Using Temperature In Atmosphere In Inactive Gas In High Vacuum (Long Time)	(ºC)	900 2100 1800	900 2100 1800	900 2100 1900	900 1750 1750	900 1750 1750	900 1800 1800	900 1800 1800	900 1750 1750
Room Temperature Electric Resistivity	Ω·cm	>1014	>1014	>1013	>1013	>1013	>1012	>1012	>1013
Typical Application	-	Nitrides Sintering	High Temperature Furance	High Temperature Furance	Powder Metallurgy	Powder Metallurgy	Powder Metallurgy	Metal Casting	Powder Metallurgy
High Temperature Electrical Furnace Components	-	-	V	V	V	V	V	V	V
Metal Vaporize Crucible	-	-	V	V	-	-	-	-	V
The Container of Metal or Glass Melting	-	V	V	V	V	V	V	V	V
The Casting Mould Components of The Precious Metal and Special Alloy.	-	-	-	V	-	V		-
High Temperature Support Part	-	-	-	-	-	V	-	V	V
Nozzle and Transport Tube of The Melting Metal	-	-	V	V	V	V	V	V	V
Nitrides Sintering (Sagger and Setter Plate)	-	✓	-	-	-	-	-	-	-
Remark:The value is just for review, different using conditions will have a little difference.