Innovacera 20mm*20mm Small Aluminum Nitride Ceramic Heating Element for Semiconductor Processing Equipment Components

• Application: Aerospace, Electronics, Medical, Refractory, Heating Solution
• Type: Ceramic Heating Element
• Color: Grey
• Voltage: 12V~240V
• Water Absorption: 0%
• Thermal Conductivity: >150 W/M.K
• Model NO.: INC-ANH210101
• Hardness: 8
• Density: 3.3G/Cm3
• Max. Use Temperature: 400ºC
• Transport Package: Carton Packing
• Specification: Customized
• Trademark: INNOVACERA
• Origin: Fujian, China

Product Description

 

 

INNOVACERA recently launched a small aluminum nitride ceramic heating element. Made of aluminum nitride ceramic with high thermal conductivity. Has excellent heat dissipation and electrical insulation properties.

With its properties of electrical insulation and excellent thermal conductivity, Aluminum Nitride Ceramics is ideal for applications where heat dissipation is required. In addition, since it offers a coefficient of thermal expansion (CTE) near that of silicon, and excellent plasma resistance, it is used for semiconductor processing equipment components. Small Aluminum Nitride Ceramic Heating Element Characteristics The heater can have a built-in K-type thermocouple, so it has good temperature sensing characteristics, improves its responsiveness to rapid heating and cooling, and can be used safely.

Fast heating and cooling The aluminum nitride substrate with high thermal conductivity can be used to achieve rapid heating and cooling, and the thermal expansion rate can be used according to the material properties to design under high power density, so it can also be used for rapid heating and cooling (both 150/ sec) temperature cycle.

Excellent electrical performance Excellent insulation and voltage resistance at high temperatures

 

Small Aluminum Nitride Ceramic Heating Element Features

Thermal properties			Physical properties			Electrical characteristics
Thermal conductivity	150(W/mK)	Density	3.2(g/cm3)	Voltage	12V~240V
Thermal expansion coefficient	4.5 (ppm/	Hardness	1050 (Hv@500g)	Leakage	1mA
-	-	Flexure strength	250 Mpa)	Capacitivity	8.9
-	-	-	-	Insulation voltage	15KV/mm

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