Application: | Semiconductor Equipment |
---|---|
Purity: | 95%-99% |
Type: | Ceramic Rings |
Suppliers with verified business licenses
Audited by an independent third-party inspection agency
Alumina Ceramic Property | |||||
Property | Unit | 92% Alumina Ceramic | 95% Alumina Ceramic | 99% Alumina Ceramic | |
Density | g/cm3 | ≥3.63 | ≥3.68 | ≥3.83 | |
Water absorption | % | O | O | O | |
Sintering temperature | °C | 1500-1700 | 1600-1800 | 1700-1800 | |
Hardness | HV | ≥1400 | ≥1500 | ≥1650 | |
Flexural strength | Kgf/cm2 | 3000 | 3000 | 3000 | |
Compressive strength | Kgf/cm2 | 24000 | 25000 | 26000 | |
Fracture toughness | Map.m3/2 | 3~4 | 3~4 | 4~5 | |
Maximum temperature | °C | 1600 | 1700 | 1800 | |
Coefficient of thermal expansion | /°C | 8*10-6 | 8*10-6 | 8*10-6 | |
Heat shock | T(°C) | 220 | 220 | 220 | |
Thermal conductivity | W/m.k(25-300°C) | 25 14 | 25 14 | 25 14 | |
20°C | >1012 | >1012 | >1012 |