Silicon Carbide / Alumina Porous Ceramic Wafer for Semiconductor Vacuum Chuck

• Application: Aerospace, Electronics, Medical, Refractory
• Grain Size: 1-10um
• Purity: 95%
• Model NO.: INCAPOROUS
• Type: Ceramic Plates
• Regular Size: 6, 8, 12 Inches
• Pore Size: 15um 30um 50um 100um
• Color: Light Brown, Brown, Blue-Gray,
• Processing Service: Moulding
• Density: 2.3-2.5 g/cm3
• Advantage: Corrosion Resistance, Have Pore Size
• Porosity: 40%, 50% or Customized
• Material: Alumina Ceramic
• Hardness (Hra): Hra ≥ 50
• Flexure Strength: MPa ≥ 40
• Compressive Strength: MPa≥600
• Porosity Factor: 40%
• Diameter Regular Tolerance: +/-0.10 mm
• Regular Flatnessb: +/-0.10 mm
• Regular Surface Roughness: Ra 0.8-1.6
• Transport Package: Carton Package
• Specification: Customized
• Trademark: Innovacera
• Origin: Fujian, China
• Production Capacity: 1000 Piece/Pieces Per Month

Product Description

The range of Innovacera porous ceramic filters are made from aluminum oxide and silicon carbide. The strong, uniform porous

ceramic has 40-50% open porosity with a tortuous pore structure and is available in pore sizes ranging from 1 to 120 microns.

Monolithic, single grade, aluminum oxide porous ceramic is available in 1, 15, 30, 50, 60, 80, 100 and 120 micron pore sizes.


Aluminum oxide is the most standard material, with a density of 2.2 g/cc, and has a maximum operating temperature of 1400 °F

(800 °C).

The range of porous ceramic products includes:

• Membrane and monolithic tubes

• Discs

• Plates and other components made from aluminum oxide and silicon carbide where tightly controlled pore size and porosity is

critical.
 

Specifically tailored techniques include:

• Spraying

• Brushing

• Backwashing

• Oven firing

• Dilute acid cleaning

• Solvent cleaning plus steam

• Ultrasonic cleaning

Porous Ceramics Applications

• Used in tough applications to replace porous metal or as an alternative to plastic or fabric media

• Cleaned and reused using a variety of methods depending on the contaminant to be removed

 

Applications

• Used in tough applications to replace porous metal or as an

alternative to plastic or fabric media

• Cleaned and reused using a variety of methods depending

on the contaminant to be removed

• Filters for gases and liquids

• Capillary Electrophoresis

• Filtration for heavy metal ions (Cr, Ni etc) in water

• High temperature chemical support for gas absorption

• High efficiency flow through catalytic supports

• Gas burners

• Chromatography

• Micro trapping systems and bio-catalytic supports

• Vacuum holding plates (vacuum chunk)

• Nano-membrane supports for sensor applications

• Micro-bubble diffusers

• Fine or micro channels for electrophoresis

• Chemical or bio reactor

 

The Detailed Regular Size as Below

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Regular size		6, 8, 12 inches
Diameter Regular Tolerance		+/-0.10 mm
Regular Flatness		+/-0.10 mm
Regular Surface Roughness		Ra 0.8-1.6
Alumina (Al2O3)	Pore Size	Color
	15 um	Light Brown
	30 um	Brown
	50 um	Blue-Gray
	100 um	Blue-Gray

Alumina materials properties
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Properties	Unit	Pore Ceramic
Al2O3 Content	wt%	≥ 80
SiO2 Content	wt%	16-18
Density	g /cm3	2.3-2.5
Hardness (HRA)	HRA ≥	50
Flexure strength	MPa ≥	40
Compressive Strength	MPa≥	600
Porosity Factor	%	40
Work Pressure	MPa ≤	10
Acid Resistance	mg/cm2 ≤	10
Alkali Resistance	mg/cm2 ≤	20

Detailed Photos